Dr.ir. Benschop received his M.Sc. (cum laude) and PhD in physics from University of Twente.

From 1984 until 1997 he worked at Philips Research Labs in Eindhoven as well as Sunnyvale (CA-USA). He joined ASML in 1997 where he started the ASML program on EUV Lithography. As Corporate Vice President Technology he is currently responsible for Research, System Engineering and the Technology Development Center.

Dr. Benschop published over 37 papers and is (co-)inventor of more than 22 patents. He is a member of the Netherlands Academy of Engineering (ACTI), a fellow of the SPIE and has been appointed by the King of The Netherlands as advisor to Dutch government and parliament for Science, Technology and Innovation (AWTI).